P-31 / Schlott P-31: Nodule Formation on Indium-Oxide Tin-Oxide Sputtering Targets
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چکیده
Nodule formation on ITO sputtering targets was investigated by stop action in-situ video observation, 3D-SIMS, and EPMA. Major cause of nodule formation is particulates from the sputtering system, less important are particulate inclusions in the target material. A nodule growth mechanism and strategies to minimize nodule formation are proposed.
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تاریخ انتشار 1997